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VHX-S15 Series 3D Profile Automatic Measurement Unit
Profile Measurement Solution (VHX-500F /600 /600 (GenII) /1000 with VHX-S15)
Product Overview

3D Profile Automatic Measurement Unit

•  All-in-one 3D profile measurement system including a precision motor stage
•  0.05 micron resolution stepping motor
•  Easy, on-screen 3D profile measurement
•  Colour topographical overlay
•  Auto calibration/Auto scaling
The new KEYENCE VHX-S15 linear stage and controller when used with the KEYENCE VHX-1000, VH-S5 stand and VH-Z500 high-power zoom lens enables automatic measurement of 3-D profiles.

VHX-S15 Profile Measurement Solution

For Full Details Download the PRODUCT CATALOGUE Using the SERVICE PULLDOWN in the HEADER Above.

3D Profile Measurement
3-D images are generated from 2-D cross sections that are automatically captured. Using this data, the height and width of projections and depressions can be measured and displayed on a graph. A cursor is used to precisely select the area on the 3-D image to be measured.
3D Profile Measurement

Colour Scale Display for Height Data
The 3-D image is rendered into a colour scale, which maps higher elevations in red, and lower elevations in blue. The colour scaled image can then be displayed on top of the raw image, creating an enhanced topographical view. To facilitate measurement, scale for the X, Y, and Z axes can be automatically calculated and displayed according to the image size and rotational position of the 3-D image.
Colour Scale Display for Height Data

Height Measurement between Two Points
The difference between two windows can easily be detected using the Auto measurement mode. The measurement can also be performed while monitoring the focus status on the Manual measurement mode screen.
Height Measurement between Two Points
VHX-S15: Specifications
VHX-S15: Specifications
1. Positioning accuracy and repeatability specifications apply to the motorized stage
2. The motorized stage for the VH-S30 is the VHX-S15F.
Controller: Specifications
Controller: Specifications
1. 2 million pixels x 3 CCD mode
2. 18 million pixels x 3 CCD mode
3. Supports only the multi-scan camera VHX-1100.
4. Approximately 16,770,000 pixels are realized with the dithering processing of the display controller.
5. The LCD monitor provided in the VHX Series is based on extremely advanced technology. Rarely, an unlit part (black spot) or lit part (bright spot) may exist on the monitor screen. However, this is not an indication of the LCD monitor being defective.
Various functions: Specifications
Various functions: Specifications
*Function can be used simply by pressing a button on the console.
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