Product Overview

3D Profile Automatic Measurement Unit

•	All-in-one 3D profile measurement system including a precision motor stage
•	0.05 micron resolution stepping motor
•	Easy, on-screen 3D profile measurement
•	Colour topographical overlay
•	Auto calibration/Auto scaling

The new KEYENCE VHX-S15 linear stage and controller when used with the KEYENCE VHX-1000, VH-S5 stand and VH-Z500 high-power zoom lens enables automatic measurement of 3-D profiles.

Support and Services

VHX-S15 Profile Measurement Solution

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3D Profile Measurement

3-D images are generated from 2-D cross sections that are automatically captured. Using this data, the height and width of projections and depressions can be measured and displayed on a graph. A cursor is used to precisely select the area on the 3-D image to be measured.

Colour Scale Display for Height Data

The 3-D image is rendered into a colour scale, which maps higher elevations in red, and lower elevations in blue. The colour scaled image can then be displayed on top of the raw image, creating an enhanced topographical view. To facilitate measurement, scale for the X, Y, and Z axes can be automatically calculated and displayed according to the image size and rotational position of the 3-D image.

Height Measurement between Two Points

The difference between two windows can easily be detected using the Auto measurement mode. The measurement can also be performed while monitoring the focus status on the Manual measurement mode screen.

VHX-S15: Specifications

1. Positioning accuracy and repeatability specifications apply to the motorized stage
2. The motorized stage for the VH-S30 is the VHX-S15F.

Controller: Specifications

1. 2 million pixels x 3 CCD mode
2. 18 million pixels x 3 CCD mode
3. Supports only the multi-scan camera VHX-1100.
4. Approximately 16,770,000 pixels are realized with the dithering processing of the display controller.
5. The LCD monitor provided in the VHX Series is based on extremely advanced technology. Rarely, an unlit part (black spot) or lit part (bright spot) may exist on the monitor screen. However, this is not an indication of the LCD monitor being defective.

Various functions: Specifications

*Function can be used simply by pressing a button on the console.

Digital Microscope

Digital Microscope

VHX-2000 NEW

Microscopes

VHX-700F NEW

16-bit Resolution Microscope (Discontinued)

VHX-1000

Digital Microscope (Discontinued)

VHX-600 (Gen II)

Easy to Use High Speed 3D Observation (Discontinued)

VHX-600

Microscopes (Standard Model) (Discontinued)

VHX-500F

3D Profile Automatic Measurement Unit

VHX-S15 Series

Microscope Lens

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