Image Dimension Measurement SystemIM-7000 series

IM-7030T

Measurement Head

SPECIFICATIONS

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Model

IM-7030T

Type

Head
Contact Height Measurement Unit

Image sensor

1” 6.6 mega pixel monochrome CMOS

Display

10. 4” LCD monitor (XGA: 1024 × 768)

Receiver lens

Double telecentric lens

Image measurement

Field of view

Wide-field measurement mode: 300 mm × 200 mm (4× R50)
High-precision measurement mode: 225 × 125 mm

Minimum display unit

0.1 µm

Repeatability

W/o stage movement

Wide-field measurement mode: ±1 µm
High-precision measurement mode: ±0.5 µm

With stage movement

Wide-field measurement mode: ±2 µm
High-precision measurement mode: ±1.5 µm

Measurement accuracy (±2σ)

W/o binding

Wide-field measurement mode: ±5 µm*1
High-precision measurement mode: ±2 µm*2

With binding

Wide-field measurement mode: ±(7 + 0.02 L) µm*3
High-precision measurement mode: ± (4 + 0.02 L) µm*4

Light probe Measurement

Measurable area (XY)

190 × 90 mm

Maximum measurement depth

30 mm

Light probe diameter

ø3 mm

Measuring force

0.015 N

Repeatability

±2 µm*5

Measurement accuracy

±(8 + 0.02 L) µm*6

Height Measurement

Measurement range

0 to 75 mm

Measuring force

0.3 N

Measurement accuracy (XY)

±0.2 mm*7

Minimum display unit

1 µm

Measurable area (XY)

Wide-field measurement mode: 145 × 95 mm
High-precision measurement mode: 107.5 × 95 mm

Repeatability

±2 µm*8

Measurement accuracy

±7.5 µm*9

External remote input

Non-voltage input (with and without contact)

External output

OK/NG/FAIL/MEAS.

PhotoMos output
Rated load 24 VDC 0.5 A
ON resistance 50 mΩ or lower

Interface

LAN

RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

USB 2.0 series A

6 ports (front: 2, rear: 4)

Record

Hard disk drive

500 GB

Illumination system

Transparent

Telecentric transparent illumination

Ring

Four division, multi-angle illumination (electric)
Slit ring (directivity) illumination (electric)

XY stage

Moving range

200 × 100 mm (electric)

Withstand load

7.5 kg

Z stage

Moving range

75 mm (electric)

Power supply

Power voltage

100–240 VAC, 50/60 Hz

Current consumption

430 VA or lower

Environmental resistance

Operating ambient temperature

+10°C to 35°C

Operating ambient humidity

20% RH to 80% RH (no condensation)

Weight

Approx. 35 kg

*1 In the range of ø80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position
*2 In the range of ø20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position
*3 In the range of 280 × 180 mm (4× R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units)
*4 In the range of 220 × 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units)
*5 When the detection system is standard. If the detection system is at a deep position, then ±3 µm
*6 When the detection system is standard, and the ambient temperature is +23°C ±1°C, with a stage load weighing 3 kg or less. If the detection system is at a deep position,then ±(10 + 0.02 L) µm with L as the measurement length in mm.
*7 Operating ambient temperature: 23°C ±1°C.
*8 With a maximum measurement height of 30 mm or less. ±3 µm when maximum measurement height is between 30 mm and 75 mm.
*9 With a maximum measurement height of 30 mm or less. ±9.5 µm when maximum measurement height is between 30 mm and 75 mm.

Measurement Systems Library

Measurement Systems