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          Confocal Displacement Sensor

          CL-3000 series

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          Optical Units and Sensor Heads - Quad type (Export Control Product)

          Model

          CL-L007G*1

          CL-L015G*1

          CL-L030G*1

          CL-L070G*1

          Type

          Optical unit

          Head

          CL-L007 *1

          CL-L015 *1

          CL-L030 *1

          CL-L070 *1

          Reference distance

          7 mm

          15 mm

          30 mm

          70 mm

          Reference measurement range

          Measurement range

          ± 1.5 mm

          ± 1.3 mm

          ± 3.7 mm

          ± 10 mm

          Linearity

          ± 1.95 µm *2

          ± 0.36 µm *2

          ± 0.81 µm*2

          ± 2.0 µm*2

          High precision measurement range

          Measurement range

          ± 0.5 mm

          ± 1.0 mm

          ± 3.0 mm

          Linearity

          ± 0.78 µm *2

          ± 0.28 µm *2

          ± 0.59 µm *2

          ± 1.9 µm *2

          Resolution

          0.015 µm*3

          0.003 µm*3

          0.015 µm*3

          0.025 µm*3

          Spot diameter

          ø 750 µm

          ø 300 µm

          ø 500 µm

          ø 600 µm

          Laser class

          Optical unit

          Class 1

          Sampling cycle

          100/200/500/1000 µs (Adjustable 4-stage)

          Environmental resistance

          Enclosure rating

          Head

          IP67 (IEC60529)

          Ambient light

          Target surface illuminance 30,000 lux (Incandescent lamp)

          Operating ambient temperature

          0 to 50°C

          Operating ambient humidity

          20% RH to 85% RH (no condensation)

          Vibration resistance

          Head

          10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes

          Optical unit

          10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes

          Shock resistance

          15G 6 ms

          Temperature characteristic

          Head

          0.005% of F.S. / °C

          Optical unit

          0.015% of F.S. / °C

          Material

          Head

          SUS

          Front: SUS Rear: Aluminium

          Optical unit

          Polycarbonate

          Weight

          Head

          Approx. 140 g

          Approx. 180 g

          Approx. 200 g

          Approx. 280 g

          Optical unit

          Approx. 1600 g

          *1 Sensor head and optical unit are a matched pair. Not cross compatible.
          *2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).
          *3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).

          Optical Units and Sensor Heads - Focused spot type (Export Control Product)

          Model

          CL-P007G*1

          CL-P015G*1

          CL-P030G*1

          CL-P070G*1

          CL-PT010G*1

          Type

          Optical unit

          Head

          CL-P007 *1

          CL-P015 *1

          CL-P030 *1

          CL-P070 *1

          CL-PT010 *1

          Reference distance

          7 mm

          15 mm

          30 mm

          70 mm

          10 mm

          Reference measurement range

          Measurement range

          ± 1.5 mm

          ± 1.3 mm

          ± 3.7 mm

          ± 10 mm

          ± 0.3 mm

          Linearity

          ± 0.83 µm *2

          ± 0.36 µm *2

          ± 0.81 µm *2

          ± 2.0 µm *2

          ± 0.11 µm *2

          High precision measurement range

          Measurement range

          ± 0.5 mm

          ± 1.0 mm

          ± 3.0 mm

          ± 0.15 mm

          Linearity

          ± 0.43 µm *2

          ± 0.28 µm *2

          ± 0.59 µm *2

          ± 1.9 µm *2

          ± 0.09 µm *2

          Resolution

          0.015 µm*3

          0.003 µm*3

          0.015 µm*3

          0.025 µm*3

          0.001 µm*3

          Spot diameter

          ø 50 µm

          ø 25 µm

          ø 38 µm

          ø 50 µm

          ø 3.5 µm

          Laser class

          Optical unit

          Class 1

          Sampling cycle

          100/200/500/1000 µs (Adjustable 4-stage)

          Environmental resistance

          Enclosure rating

          Head

          IP67 (IEC60529)

          IP64 (IEC60529)

          Ambient light

          Target surface illuminance 30,000 lux (Incandescent lamp)

          Operating ambient temperature

          0 to 50°C

          Operating ambient humidity

          20% RH to 85% RH (no condensation)

          Vibration resistance

          Head

          10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes

          10 to 57 Hz, double amplitude 0.45 mm; 2 hours each for X, Y,and Z axes

          Optical unit

          10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes

          Shock resistance

          15G 6 ms

          Temperature characteristic

          Head

          0.005% of F.S. / °C

          0.1% of F.S. / °C

          Optical unit

          0.015% of F.S. / °C

          Material

          Head

          SUS

          Front: SUS Rear: Aluminium

          Optical unit

          Polycarbonate

          Weight

          Head

          Approx. 140 g

          Approx. 180 g

          Approx. 200 g

          Approx. 280 g

          Approx. 1100 g

          Optical unit

          Approx. 1600 g

          *1 Sensor head and optical unit are a matched pair. Not cross compatible.
          *2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).
          *3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface). (Value measured with 4096 average cycles on CL-PT010/CL-PT010G only.)

          Optical Units and Sensor Heads - Quad type

          Model

          CL-L007N*1

          CL-L015N*1

          CL-L030N*1

          CL-L070N*1

          Type

          Optical unit

          Head

          CL-L007 *1

          CL-L015 *1

          CL-L030 *1

          CL-L070 *1

          Reference distance

          7 mm

          15 mm

          30 mm

          70 mm

          Reference measurement range

          Measurement range

          ± 1.5 mm

          ± 1.3 mm

          ± 3.7 mm

          ± 10 mm

          Linearity

          ± 2.1 µm *2

          ± 0.49 µm *2

          ± 0.94 µm*2

          ± 2.2 µm*2

          High precision measurement range

          Measurement range

          ± 0.5 mm

          ± 1.0 mm

          ± 3.0 mm

          Linearity

          ± 0.91 µm *2

          ± 0.41 µm *2

          ± 0.72 µm *2

          ± 2.0 µm *2

          Resolution

          0.25 µm*3

          Spot diameter

          ø 750 µm

          ø 300 µm

          ø 500 µm

          ø 600 µm

          Laser class

          Optical unit

          Class 1

          Sampling cycle

          100/200/500/1000 µs (Adjustable 4-stage)

          Environmental resistance

          Enclosure rating

          Head

          IP67 (IEC60529)

          Ambient light

          Target surface illuminance 30,000 lux (Incandescent lamp)

          Operating ambient temperature

          0 to 50°C

          Operating ambient humidity

          20% RH to 85% RH (no condensation)

          Vibration resistance

          Head

          10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes

          Optical unit

          10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes

          Shock resistance

          15G 6 ms

          Temperature characteristic

          Head

          0.005% of F.S. / °C

          Optical unit

          0.015% of F.S. / °C

          Material

          Head

          SUS

          Front: SUS Rear: Aluminium

          Optical unit

          Polycarbonate

          Weight

          Head

          Approx. 140 g

          Approx. 180 g

          Approx. 200 g

          Approx. 280 g

          Optical unit

          Approx. 1600 g

          *1 Sensor head and optical unit are a matched pair. Not cross compatible.
          *2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).
          *3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).

          Optical Units and Sensor Heads - Focused spot type

          Model

          CL-P007N*1

          CL-P015N*1

          CL-P030N*1

          CL-P070N*1

          CL-PT010N*1

          Type

          Optical unit

          Head

          CL-P007 *1

          CL-P015 *1

          CL-P030 *1

          CL-P070 *1

          CL-PT010 *1

          Reference distance

          7 mm

          15 mm

          30 mm

          70 mm

          10 mm

          Reference measurement range

          Measurement range

          ± 1.5 mm

          ± 1.3 mm

          ± 3.7 mm

          ± 10 mm

          ± 0.3 mm

          Linearity

          ± 0.96 µm*2

          ± 0.49 µm*2

          ± 0.94 µm*2

          ± 2.2 µm*2

          ± 0.22 µm*2

          High precision measurement range

          Measurement range

          ± 0.5 mm

          ± 1.0 mm

          ± 3.0 mm

          ± 0.15 mm

          Linearity

          ± 0.55 µm *2

          ± 0.41 µm *2

          ± 0.72 µm *2

          ± 2.0 µm *2

          ± 0.2 µm *2

          Resolution

          0.25 µm*3

          Spot diameter

          ø 50 µm

          ø 25 µm

          ø 38 µm

          ø 50 µm

          ø 3.5 µm

          Laser class

          Optical unit

          Class 1

          Sampling cycle

          100/200/500/1000 µs (Adjustable 4-stage)

          Environmental resistance

          Enclosure rating

          Head

          IP67 (IEC60529)

          IP64 (IEC60529)

          Ambient light

          Target surface illuminance 30,000 lux (Incandescent lamp)

          Operating ambient temperature

          0 to 50°C

          Operating ambient humidity

          20% RH to 85% RH (no condensation)

          Vibration resistance

          Head

          10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes

          10 to 57 Hz, double amplitude 0.45 mm; 2 hours each for X, Y, and Z axes

          Optical unit

          10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes

          Shock resistance

          15G 6 ms

          Temperature characteristic

          Head

          0.005% of F.S. / °C

          0.1% of F.S. / °C

          Optical unit

          0.015% of F.S. / °C

          Material

          Head

          SUS

          Front: SUS Rear: Aluminium

          Optical unit

          Polycarbonate

          Weight

          Head

          Approx. 140 g

          Approx. 180 g

          Approx. 200 g

          Approx. 280 g

          Approx. 1100 g

          Optical unit

          Approx. 1600 g

          *1 Sensor head and optical unit are a matched pair. Not cross compatible.
          *2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).
          *3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).(Value measured with 4096 average cycles on CL-PT010/CL-PT010N only.)

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