Surface Scanning Laser Confocal Displacement Meter

Excellent Resolution of 0.3 µm

High-accuracy Measurement Method Uses the Confocal Principle and Tuning Fork

The laser beam is focused on the target surface through an objective lens that vibrates up and down at high speed by means of a tuning fork. The beam reflected off the target surface is converged on a pinhole and then enters the light-receiving element. By measuring the exact position of the objective lens when the light enters the receiving element, the target height can be determined. The sensor measures the distance to the target surface accurately without being affected by the material, colour, or angle of the target.

Improved Performance

The coaxial optical system improves measurement performance