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Surface Scanning Laser Confocal Displacement Meter

LT-9000 series

Rough Surface Targets

Unbeatable Performance in Automation and Sensing Applications.

Light intensity function for stable measurement over rough surfaces

Transparent Target Angle Check

Rough Surface Measurment

The LT-9000 series utilises a light intensity integration function and laser scanning method that enables high stability measurements of rough-surfaced targets. For example the warpage of a wafer with a pattern can be measured stably.

Corroded metal surface profile inspection

Corroded Surface Profile

Surface Corrosion Profile Measurement

The LT-9000 Series Surface Scanning Laser Confocal Displacement Meter is used to measure the surface profile of metal samples after corrosion.The measurement resolution is 0.3 ┬Ám. The 2- m beam spot diameter enables accurate tracing of sample profiles.

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