Excellent Resolution of 0.3µm for High-accuracy Applications
The laser beam is focused on the target surface through an objective lens that vibrates up and down at high speed by means of a tuning fork. The beam reflected off the target surface is converged on a pinhole and then enters the light-receiving element. By measuring the exact position of the objective lens when the light enters the receiving element, the target height can be determined. The sensor measures the distance to the target surface accurately without being affected by the material, colour, or angle of the target.
The coaxial optical system improves measurement performance
A small amount of received light passes through the pinhole.
All of the received light passes through the pinhole.