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          7. 3D Auto Measurement Unit (S30 Stage)

          Digital MicroscopeVHX-2000 series

          3D Auto Measurement Unit (S30 Stage)

          VHX-S15F

          SPECIFICATIONS

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          Model

          VHX-S15F

          Motor

          5-phase stepping motor

          Positioning accuracy

          6 µm*1

          Repeatability

          ±0.5 µm*1

          Stage stroke distance

          15 mm

          Resolution

          0.05 µm/pulse

          Load capacity

          5 kg

          Rating

          Power voltage

          100 to 240 VAC, 50/60 Hz

          Power consumption

          70 VA

          Environmental resistance

          Ambient temperature

          +5 to +40 °C

          Relative humidity

          35 to 80 % RH (No condensation)

          Weight

          3.2 kg

          *1 Positioning accuracy and repeatability specifications apply to the motorised stage

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