Image Dimension Measuring SystemIM-7000 series

IM-7020

Measurement Head

SPECIFICATIONS

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Model

IM-7020

Type

Head
Model incorporating backlighting/programmable ring-illumination unit/light probe unit

Image sensor

1” 6.6 mega pixel monochrome CMOS

Display

10. 4” LCD monitor (XGA: 1024 × 768)

Receiver lens

Double telecentric lens

Image measurement

Field of view

Wide-field measurement mode: 200 mm × 200 mm (4 × R50)
High-precision measurement mode: 125 × 125 mm

Minimum display unit

0.1 µm

Repeatability

W/o stage movement

Wide-field measurement mode: ±1 µm
High-precision measurement mode: ±0.5 µm

With stage movement

Wide-field measurement mode: ±2 µm
High-precision measurement mode: ±1.5 µm

Measurement accuracy (±2σ)

W/o binding

Wide-field measurement mode: ±5 µm*1
High-precision measurement mode: ±2 µm*2

With binding

Wide-field measurement mode: ± (7 + 0.02 L) µm*3
High-precision measurement mode: ± (4 + 0.02L) µm*4

Light probe Measurement

Measurable area (XY)

90 × 90 mm

Maximum measurement depth

30 mm

Light probe diameter

ø3 mm

Measuring force

0.015 N

Repeatability

±2 µm*5

Measurement accuracy

± (8 + 0.02 L) µm*6

External remote input

Non-voltage input (with and without contact)

External output

OK/NG/FAIL/MEAS.

PhotoMos output
Rated load 24 VDC 0.5 A
ON resistance 50 mΩ or lower

Interface

LAN

RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

USB 2.0 series A

6 ports (front: 2, rear: 4)

Record

Hard disk drive

500 GB

Illumination system

Transparent

Telecentric transparent illumination

Ring

Four division, multi-angle illumination (electric)
Slit ring (directivity) illumination (electric)

XY stage

Moving range

100 × 100 mm (electric)

Withstand load

5 kg

Z stage

Moving range

75 mm (electric)

Power supply

Power voltage

100 to 240 VAC 50/60 Hz

Power consumption

430 VA or lower

Environmental resistance

Pollution degree

2

Overvoltage category

II

Ambient temperature

+10 to +35 °C

Relative humidity

20 to 80 % RH (No condensation)

Weight

Approx. 31 kg

*1 In the range of ø80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position
*2 In the range of ø20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position
*3 In the range of 180 × 180 mm (4 × R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units)
*4 In the range of 120 × 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units)
*5 When the detection system is standard. If the detection system is at a deep position, then ±3 µm
*6 When the detection system is standard, and the ambient temperature is 23°C ±1°C, with a stage load weighing 2 kg or less. If the detection system is at a deep position, then ± (10 + 0.02 L) µm with L as the measurement length in mm.

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