Image Dimension Measurement System

IM-7000 series

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Controller IM-7500

IM-7500 - Controller

  • CE Marking
  • CSA

Specifications

Model

IM-7500

Type

Controller

Image sensor

1” 6.6 mega pixel monochrome CMOS

Display

10. 4” LCD monitor (XGA: 1024 × 768)

Receiver lens

Double telecentric lens

Image measurement

Field of view

Wide-field measurement mode

[IM-7010] 200 mm × 200 mm (4× R50)
[IM-7020] 200 mm × 200 mm (4× R50)
[IM-7030] 300 mm × 200 mm (4× R50)

High-precision measurement mode

[IM-7010] 125 × 125 mm
[IM-7020] 125 × 125 mm
[IM-7030] 225 × 125 mm

Minimum display unit

0.1 µm

Repeatability

Wide-field
measurement mode

W/o stage movement

±1 µm

With stage movement

±2 µm

High-precision
measurement mode

W/o stage movement

±0.5 µm

With stage movement

±1.5 µm

Measurement
accuracy (±2σ)

Wide-field
measurement mode

W/o binding

±5 µm*1

With binding

[IM-7010/IM-7020] ±(7 + 0.02 L) µm*2
[IM-7030] ±(7 + 0.02 L) µm*3

High-precision
measurement mode

W/o binding

±2 µm*4

With binding

[IM-7010/IM-7020] ±(4 + 0.02 L) µm*5
[IM-7030] ± (4 + 0.02 L) µm*6

Light probe Measurement

Measurable area (XY)

[IM-7010] -
[IM-7020] 90 × 90 mm
[IM-7030] 190 × 90 mm

Maximum measurement depth

[IM-7010] -
[IM-7020] 30 mm
[IM-7030] 30 mm

Light probe diameter

[IM-7010] -
[IM-7020] ø3 mm
[IM-7030] ø3 mm

Measuring force

[IM-7010] -
[IM-7020] 0.015 N
[IM-7030] 0.015 N

Repeatability

[IM-7010] -
[IM-7020] ±2 µm*7
[IM-7030] ±2 µm*7

Measurement accuracy

[IM-7010] -
[IM-7020] ±(8 + 0.02 L) µm*8
[IM-7030] ±(8 + 0.02 L) µm*9

External remote input

Non-voltage input (with and without contact)

External output

OK/NG/FAIL/MEAS.

PhotoMos output
Rated load 24 VDC 0.5 A
ON resistance 50 mΩ or lower

Interface

LAN

RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

USB 3.1

4 ports (rear: 4)

USB 2.0 series A

2 ports (front: 2)

Record

Hard disk drive

500 GB

Illumination system

Transparent

Telecentric transparent illumination

Ring

[IM-7010] Four division ring illumination
[IM-7020] Four division, multi-angle illumination (electric) /Slit ring (directivity) illumination (electric)
[IM-7030] Four division, multi-angle illumination (electric) /Slit ring (directivity) illumination (electric)

XY stage

Moving range

[IM-7010] 100 × 100 mm (electric)
[IM-7020] 100 × 100 mm (electric)
[IM-7030] 200 × 100 mm (electric)

Withstand load

[IM-7010] 5 kg
[IM-7020] 5 kg
[IM-7030] 7.5 kg

Z stage

Moving range

75 mm (electric)

Power supply

Power voltage

100–240 VAC, 50/60 Hz

Power consumption

430 VA or lower

Environmental resistance

Ambient temperature

+10°C to 35°C

Relative humidity

20% RH to 80% RH (no condensation)

Weight

Controller: Approx. 8 kg
Head: Approx. 30 kg (IM-7010), Approx. 31 kg (IM-7020), Approx. 33 kg (IM-7030)

*1 In the range of ø80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position
*2 In the range of 180 × 180 mm (4× R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units)
*3 In the range of 280 × 180 mm (4× R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units)
*4 In the range of ø20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position
*5 In the range of 120 × 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units)
*6 In the range of 220 × 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units)
*7 When the detection system is standard. If the detection system is at a deep position, then ±3 µm
*8 When the detection system is standard, and the ambient temperature is +23°C ±1°C, with a stage load weighing 2 kg or less. If the detection system is at a deep position, then ±(10 + 0.02 L) µm with L as the measurement length in mm.
*9 When the detection system is standard, and the ambient temperature is +23°C ±1°C, with a stage load weighing 3 kg or less. If the detection system is at a deep position, then ±(10 + 0.02 L) µm with L as the measurement length in mm.

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