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  7. 300 × 200 mm square stage Wide stage model incorporating programmable ring-illumination/light probe unit/Contact Height Measurement Unit

Image Dimension Measurement SystemIM-8000 series

300 × 200 mm square stage Wide stage model incorporating programmable ring-illumination/light probe unit/Contact Height Measurement Unit

IM-8030T

SPECIFICATIONS

Select Language

Model

IM-8030T

Type

Head

Image sensor

1" 20-megapixel monochrome CMOS

Display

12.1" LCD monitor (WXGA: 1280 × 800)

Receiver lens

Double telecentric lens

Image measurement

Field of view

Wide-field measurement mode

300 × 200 mm (4× R50)

High-precision measurement mode

225 × 125 mm

Minimum display unit

0.1 μm

Repeatability

Wide-field measurement mode

Without stage movement

±1 μm

With stage movement

±2 μm

High-precision measurement mode

Without stage movement

±0.5 μm

With stage movement

±1.5 μm

Measurement accuracy (±2σ)

Wide-field measurement mode

Without binding

±3.9 μm *1

With binding

±(7 + 0.02 L) μm *2

High-precision measurement mode

Without binding

±2 μm *3

With binding

±(4 + 0.02 L) μm *4

Outer diameter measurement

Measurement accuracy

Wide-field measurement mode

±(2.8 + 0.02 D) μm *5

High-precision measurement mode

±(1.4 + 0.04 D) μm *6

Light probe measurement

Measurable area (XY)

190 × 90 mm

Maximum measurement depth

30 mm

Light probe diameter

ø3 mm

Measuring force

0.015 N

Repeatability

±2 μm *7

Measurement accuracy

±(8 + 0.02 L) μm *8

Height Measurement Unit

Measurement range

0 to 75 mm

Measuring force

0.3 N

Measurement accuracy (XY)

±0.2 mm *9

Minimum display unit

1 μm

Measurable area (XY)

Wide-field measurement mode

145 × 95 mm

High-precision measurement mode

107.5 × 95 mm

Repeatability

±2 μm *10

Measurement accuracy

±7.5 μm *11

External remote input

Non-voltage input (with and without contact)

External output

OK/NG/FAIL/MEAS.

PhotoMos output
Rated load: 24 VDC 0.5 A
ON resistance: 50 mΩ or lower

Interface

LAN

RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

USB 3.1

4 ports (rear: 4)

USB 2.0 series A

4 ports (front: 2, rear: 2)

Monitor output

DVI-D

Record

Hard disk drive

500 GB

Illumination system

Transparent

Telecentric transparent illumination

Ring

Four division, multi-angle illumination (electric), Slit ring (directivity) illumination (electric)

XY stage

Moving range

200 × 100 mm (electric)

Withstand load

7.5 kg

Z stage

Moving range

75 mm (electric)

Power supply

Power voltage

100 to 240 VAC ±10%, 50/60 Hz

Power consumption

430 VA or lower

Environmental resistance

Operating ambient temperature

+10 to 35°C

Operating ambient humidity

20 to 80% RH (no condensation)

Overvoltage category

II

Pollution degree

2

Weight

Approx. 35 kg

*1 In the range of ø80 mm, within the operating ambient temperature range of +23 ±1°C at the focal point position.
*2 In the range of 280 × 180 mm (4× R40), within the operating ambient temperature range of +23 ±1°C at the focal point position, and with a load weighing 3 kg or less on the stage. L is the amount of stage movement (in mm).
*3 In the range of ø20 mm, within the operating ambient temperature range of +23 ±1°C at the focal point position.
*4 In the range of 220 × 120 mm, within the operating ambient temperature range of +23 ±1°C at the focal point position, and with a load weighing 3 kg or less on the stage. L is the amount of stage movement (in mm).
*5 Within the range of L218 mm × ø60 mm. At the focal point position, with the part positioned in the centre of the lens field of view, and with the shaft direction of the part facing the horizontal direction of the lens field of view. Within the operating ambient temperature range of +23 ±1°C. D is the Y direction distance (in mm).
*6 Within the range of L206 mm × ø20 mm. At the focal point position, with the part positioned in the centre of the lens field of view, and with the shaft direction of the part facing the horizontal direction of the lens field of view. Within the operating ambient temperature range of +23 ±1°C. D is the Y direction distance (in mm).
*7 When the detection system is standard. If the detection system is at a deep position, ±3 μm.
*8 When the detection system is standard, within the operating ambient temperature range of +23 ±1°C, and with a load weighing 3 kg or less on the stage. If the detection system is at a deep position, ±(10 + 0.02 L) μm with L as the measurement length (in mm).
*9 Operating ambient temperature: +23°C ±1°C.
*10 With a maximum measurement height of 30 mm or less. ±3 μm when maximum measurement height is between 30 and 75 mm.
*11 Standard glass, with a maximum measurement height of 30 mm or less. ±9.5 μm when maximum measurement height is between 30 and 75 mm.

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