Free-angle observation system (XYZ electric stage) VHX-S650E

VHX-S650E - Free-angle observation system (XYZ electric stage)

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

  • CE Marking
  • CSA




XYθ stage

XY stage: Electric/Manual


XY-stage moving range

±20 mm

θ rotation angle


XYθ stage size

Top surface: 171 × 168 mm (Centre disc: ø100)

Transmitted illumination-compatible magnification

20 × or higher

Z stage

Z stage: Electric/Manual


Z-motorised stage motor

5-phase stepping motor

Z-motorised stage travel speed

17 mm/sec (max.)

Z-stage moving range

49 mm

Load capacity

5 kg

XYθ stage

XY-motorised stage motor

2-phase stepping motor

XY-motorised stage resolution

1 µm (typ.)

XY-motorised stage movement speed

10 mm/sec (max.)

Z stage

Z-motorised stage resolution

0.1 µm (typ.)

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

60 VA

Environmental resistance

Ambient temperature

+5 to 40 °C

Relative humidity

35 to 80 % RH (No condensation)


Approx. 18 kg

Data Sheet (PDF) Other Models