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Eccentricity measurement of a susceptor

Eccentricity measurement of a susceptor

Semiconductor manufacturing

Abnormal eccentricity causes irregular parts to be created

Benefit

High speed sampling and high accuracy measurements can decrease cycle time while maintaining the same quality

LEARN THE DETAILS OF THE PRODUCT

  • This sensor utilises laser triangulation to balance best-in-class speed and accuracy to provide excellent performance for a wide range of applications.

  • 6 sensor-heads are available with the newly-developed algorithm and 2 types of optical systems.